OnTool DryPump^TM

Dry Pump that Attaches Directly to your System.
Cost-effective. Rugged. Flexible.
 
The OnTool DryPump is a compact, rugged dry pump that is especially suitable for use in semiconductor technology, for laboratory applications and in the coating industry.
  
Advantages at a glance

• Compact, multi-stage dry pump
• Significant initial cost savings through installation directly to the system
• High process throughputs, low leakage rates
• Reduced contamination due to soft pumping capability
• No fore-vacuum lines (heated) required
• High level of reliability due to contactless, wear-free seal

 
Applications

• Physical vapor deposition (PVD)
• Chemical vapor deposition (CVD)
• Etching
• EUV lithography
• Plasma coating
• Thermal evaporation
• Laboratory applications
• Vacuum funaces
• Load-locks
   
  

Whatever your needs are we want you to get it fast and conveniently.
If you can't find what you want contact us:

Phone: 1-800-248-8254
E-Mail: contact@pfeiffer-vacuum.com

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