Pfeiffer Vacuum

Tables

1 Introduction to Vacuum Technology

Table 1.1
Composition of atmospheric air
Table 1.2
Pressure ranges in vacuum technology
Table 1.3
Conversion table for units of pressure
Table 1.4
Molar masses and mean thermal velocities of various gases
Table 1.5
Mean free path of selected gases at 273.15K
Table 1.6
Mean free path of a nitrogen molecule at 273.15K (0 °C)
Table 1.7
Overview of types of flow regimes
Table 1.8
Conversion table for units of throughput

2 Basic calculations

Table 2.1
Pumping speed of a Roots pumping station and pump-down times

3 Mechanical components in vacuum

Table 3.1
Chemical composition (mass fraction) of stainless steels according to the European material designation pursuant to EN 10088 part 1
Table 3.2
Chemical composition (mass fraction) of stainless steels according to the material designation pursuant to AISI (American Iron and Steel Institute)
Table 3.3
Stainless steel properties
Table 3.4
Elastomer properties
Table 3.5
Comparison of sealing materials
Table 3.6
Mechanical characteristics and material of screws at room temperature
Table 3.7
Friction coefficient for stainless steel and zinc-plated steel screws
Table 3.8
Temperature dependence of the 0.2% yield point for stainless steel and steel screws with diameters ≤ M24
Table 3.9
Maximum tightening torque and maximum resulting preload force for stainless steel screws
Table 3.10
Maximum tightening torque and maximum resulting preload force for steel screws of strength class 8.8

4 Vacuum generation

Table 4.1
HenaLine performance data (all data refer to 50 Hz operation)
Table 4.2
UnoLine Plus performance data (all data refer to 50 Hz operation)
Table 4.3
PentaLine performance data
Table 4.4
DuoLine performance data
Table 4.5
Duo M series performance data
Table 4.6
Duo MC series performance data
Table 4.7
Pascal SD series performance data
Table 4.8
Pascal I series performance data
Table 4.9
Pascal C1 series performance data
Table 4.10
Pascal C2 series performance data
Table 4.11
Oil types for Backing pumps and Roots pumps
Table 4.12
Diaphragm pump performance data
Table 4.13
HeptaDry performance data
Table 4.14
Possible configurations of air cooled multi-stage Roots pumps
Table 4.15
Air cooled multi-stage Roots pump performance data
Table 4.16
Performance data for water cooled multi-stage Roots pumps for noncorrosive applications
Table 4.17
Performance data for P series water cooled multi-stage Roots pumps for corrosive applications
Table 4.18
Performance data for H series water cooled multi-stage Roots pumps for corrosive applications (harsh processes)
Table 4.19
OktaLine performance data
Table 4.20
OnTool Booster performance data
Table 4.21
Selected performance data for HiPace® for nitrogen
Table 4.22
Performance data for magnetic-bearing turbopumps for nitrogen

5 Vacuum measuring equipment

Table 5.1
Active and passive vacuum gauges
Table 5.2
Vacuum gauge selection guide

6 Mass spectrometers and residual gas analysis

Table 6.1
Filament materials and their use
Table 6.2
Detectors and their attributes
Table 6.3
Various gas inlet systems and their attributes

7 Leak detection

Table 7.1
Local leak detection by sniffer and vacuum methods
Table 7.2
Integral leak detection by means of the sniffer and vacuum methods
Table 7.3
Comparison of leak detector and quadrupole mass spectrometer
Table 7.4
Pfeiffer Vacuum leak detectors
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