Pfeiffer Vacuum

4.9.3.1 Mechanical-bearing turbopumps

In the case of HiPace® turbopumps with oil-lubricated ball bearings on the fore-vacuum side and permanent-magnet bearings on the high vacuum side, a distinction is made between the following turbopump series:

  • HiPace® with ISO-K flanges: HiPace turbo drag pumps with Holweck stages for generating high vacuum for standard applications
  • HiPace® with CF flanges: HiPace turbo drag pumps with Holweck stages for generating ultra-high vacuum
  • HiPace® Plus: HiPace turbo drag pumps with Holweck stages with a reduced magnetic stray field and an extra low vibration level
  • HiPace® P: classic turbopumps for applications with a dust content
  • HiPace® C: classic turbopumps with coating and sealing gas system for corrosive gas applications
Standard HiPace turbopumps

Figure 4.29: Standard HiPace turbopumps

Table 4.21 contains the characteristics of standard pumps with hybrid bearings. All other series are modifications of these standard models and essentially have the same characteristics.

HiPace turbomolecular pumps
Model Pumping speed Compression Ratio Gas throughput* Applications
HiPace 10 11.5 l · s-1  3.0 · 107 0.37 hPa · l · s-1 Analytical applications, leak detectors, gas flow control systems, incandescent and fluorescent lamp manufacturing
SplitFlow 50 53 l · s-1 >1.0 · 108 1.8 hPa · l · s-1
HiPace 60 P 64 l · s-1 >1.0 · 106 9.2 hPa · l · s-1
HiPace 80 67 l · s-1 >1.0 · 1011 1.3 hPa · l · s-1 Analytical applications, research & development, coating, semiconductor manufacturing
HiPace 300 260 l · s-1 >1.0 · 1011 5.0 hPa · l · s-1
HiPace 400 355 l · s-1 >1.0 · 1011 6.5 hPa · l · s-1
HiPace 700 685 l · s-1 >1.0 · 1011 6.5 hPa · l · s-1
HiPace 800 790 l · s-1 >1.0 · 1011 6.5 hPa · l · s-1
HiPace 1200 1,250 l · s-1 >1.0 · 108 20 hPa · l · s-1 Glass coating, solar cell manufacturing, surface finishing, CVD, PVD / sputtering, ion implantation, plasma physics, space simulation
HiPace 1500 1,450 l · s-1 >1.0 · 108 20 hPa · l · s-1
HiPace 1800 1,450 l · s-1 >1.0 · 108 20 hPa · l · s-1
HiPace 2300 1,900 l · s-1 >1.0 · 108 20 hPa · l · s-1

*) The gas throughput depends on the drive.
Table 4.21: Selected performance data for HiPace® for nitrogen

The base pressures of standard pumps with ISO-K flanges are: $p_b$ < 1 · 10-7 hPa. After baking out, pumps with CF flanges attain base pressures of $p_b$ < 5 · 10-10 hPa.

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