Pfeiffer Vacuum

7.2 Leak detection with tracer gases

Pfeiffer Vacuum uses leak detectors based upon mass spectrometers and quartz window sensors to detect the presence of tracer gases. Mass spectrometers ionize a gas mixture and isolate the desired tracer gas on the basis of their mass-to-charge ratio. Quartz window sensors are based on the selective permeation of light gases through a quartz membrane.