Pfeiffer Vacuum

5.2.3 Calibrating the leak detector

The leak detector must be calibrated in order to determine leakage rates. This is done by means of a commercial test leak, a small helium-filled vessel with a shut-off valve that emits the defined quantity of gas. This is usually integrated into the leak detector or connected to the intake side of it. For calibration, an appropriate working cycle is often built in that automatically performs the calibration.

To obtain precise measurements, the device should be calibrated before each use. To test large workpieces for which additional vacuum pumps are in use, it is advantageous to use an external test leak. The measurement accuracy can be a function of where the test leak is attached. Consequently, it is necessary to take flow conditions within the vacuum area into consideration.

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