Pfeiffer Vacuum

5.2 Leak detection with helium

Mass spectrometers that are set to helium's atomic weight of 4 are used to detect the pre-sence of helium. Mass spectrometers operate only in the molecular flow range, i.e. under vacuum at pressures p of less than 10-4 mbar. Sector field devices are used for reasons of cost and because of their robust design.

The operating principle of these devices is described in 4.1.1.

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