Pfeiffer Vacuum A Passion for Perfection

Figures

Figure 1.1
Overview of vacuum
Figure 1.2
Definition of total pressure
Figure 1.3
Definition of partial pressure
Figure 1.4
Mean free paths
Figure 1.5
Types of flow in a vacuum
Figure 1.6
Flow ranges in vacuum
Figure 1.7
Diagram for determining pipe conductivities
Figure 1.8
Outflow function for gas dynamic flow
Figure 1.9
Vapor pressure curves of various substances
Figure 1.10
Saturation vapor pressure of water
Figure 2.1
Overview of vacuum pumps
Figure 2.2
Operating principle of a rotary vane pump
Figure 2.3
Pfeiffer Vacuum rotary vane pumps
Figure 2.4
Accessories for rotary vane pumps
Figure 2.5
Operating principle of a diaphragm pump
Figure 2.6
Diaphragm pump model designations
Figure 2.7
Operating principle of a piston pump
Figure 2.8
Operating principle of a screw pump
Figure 2.9
HeptaDry™ rotors
Figure 2.10
HeptaDry™ operating range
Figure 2.11
HeptaDry™ with connections and accessories
Figure 2.12
Operating principle of a Roots pump
Figure 2.13
Operating principle of a gas-cooled Roots pump
Figure 2.14
No-load compression ratio for air with Roots pumps
Figure 2.15
Pumping speeds of pumping stations with Okta 2000 and various backing pumps
Figure 2.16
Operating principle of a side channel vacuum pump
Figure 2.17
Operating principle of a turbomolecular pump
Figure 2.18
Specific turbopump pumping speeds
Figure 2.19
Pumping speed as a function of molecular weight
Figure 2.20
Pumping speed as a function of inlet pressure
Figure 2.21
Operating principle of a Holweck stage
Figure 2.22
Compression ratios of pure turbopumps and turbo drag pumps
Figure 2.23
Typical residual gas spectrum of a turbomolecular pump
Figure 2.24
Standard HiPace™ turbopumps
Figure 2.25
HiPace™ MC magnetic-levitation turbopump
Figure 2.26
Accessories for turbopumps
Figure 3.1
Design of a diaphragm vacuum gauge
Figure 3.2
Design of a capacitative diaphragm vacuum gauge
Figure 3.3
Operating principle of a Pirani vacuum gauge
Figure 3.4
Pirani vacuum gauge curves
Figure 3.5
Design of an inverted magnetron
Figure 3.6
Operating principle of an inverted magnetron
Figure 3.7
Design of a Bayard-Alpert vacuum gauge
Figure 3.8
Pressure measurement ranges and measurement principles
Figure 3.9
DigiLine™ application concepts
Figure 3.10
ActiveLine application concepts
Figure 3.11
TPG 300 control unit for ModulLine vacuum gauges
Figure 4.1
Total and partial pressure measurement
Figure 4.2
Components of a mass spectrometer
Figure 4.3
Operating principle of a sector field mass spectrometer
Figure 4.4
Operating principle of a quadrupole mass spectrometer
Figure 4.5
Stability diagram of a quadrupole filter
Figure 4.6
Ion density as a function of electron energy
Figure 4.7
Fractal ion distribution of CO2
Figure 4.8
Section through an axial ion source
Figure 4.9
Lattice ion source
Figure 4.10
Discrimination of EID ions
Figure 4.11
Crossbeam ion source
Figure 4.12
Gas-tight axial ion source
Figure 4.13
Sputter process monitor (SPM) ion source
Figure 4.14
PrismaPlus™ ion source
Figure 4.15
Operating principle of a Faraday Cup
Figure 4.16
Secondary electron multiplier (SEM)
Figure 4.17
Operating principle of a C-SEM
Figure 4.18
Quadrupole mass spectrometer with gas inlet system, crossbeam ion source and cooling trap
Figure 4.19
Differentially pumped quadrupole mass spectrometer with various gas inlets
Figure 4.20
Potential curve in an electrically biased ion source
Figure 4.21
Design of the detectors in a QMA 400 HiQuad™ analyzer with Faraday cup and SEM
Figure 5.1
Bubble leak test for a bicycle tube
Figure 5.2
Schematic diagram of a helium counterflow leak detector
Figure 5.3
Local leak detection by means of the sniffer and vacuum methods
Figure 5.4
Integral leak detection by means of the sniffer and vacuum methods
Figure 5.5
SmartTest HLT 560 leak detector
Figure 5.6
SmartTest leak detector, HLT 572 with bypass and dry backing pump
Figure 6.1
O-ring in groove and corner positions
Figure 6.2
Centering rings
Figure 6.3
Trapezoid seal with spacer
Figure 6.4
Rotary feedthrough with radial shaft seal ring
Figure 6.5
Small flange connection
Figure 6.6
Clamping and fixed flange connections
Figure 6.7
CF flange connection
Figure 6.8
High vacuum angle valve
Figure 6.9
Electropneumatically actuated high vacuum inline valve
Figure 6.10
Rebound gate valve
Figure 6.11
Electromagnetically actuated bellows-sealed rebound gate valve
Figure 6.12
Pneumatically actuated plate valve
Figure 6.13
UHV dosing valve and electromagnetic angle valve
Figure 6.14
UHV cat's-tail feedthrough
Figure 6.15
UHV multiple metal-to-ceramic electric feedthrough
Figure 7.1
Volume flow rate (pumping speed) of a pumping station with Hepta 100 and Okta 500
Figure 7.2
Drying system (schematic)
Figure 7.3
Roots pumping station for vapor condensation
Figure 7.4
Throughput of TPH 2000 PC and Duo 120 C
Figure 7.5
Vacuum system with pressure and throughput regulation
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