4.1.4 Portfolio
Pfeiffer Vacuum offers two basic mass spectrometer models:
- The compact PrismaPlus with a 6 mm rod system and a length of 100 mm, and
- The high-resolution HiQuad with mass filter diameters of 8 mm and 16 mm and a length of 300 mm
PrismaPlus™
This is a compact device whose entire electronics are attached to the analyzer and can be removed for bake-out. The PrismaPlus unites the following features:
- Mass ranges of 100, 200 and 300 amu
- A Faraday cup and a C-SEM are available as detectors
- Can be equipped with a variety of ion sources and filaments
- The analyzer can be baked out at up to 150 °C The PrismaPlus is used as a standalone device, and can also be integrated into modules and analysis systems.
HiQuad®
These devices offer the utmost in accuracy and unite the following features:
- The 1–16 amu, 1–128 amu, 1–340 amu, 1–300 amu, 1–512 amu, 1–1,024 amu and 1–2,048 amu mass ranges can be covered by various models
- There are various mass filters with rod diameters of 6 mm, 8 mm molybdenum, 8 mm stainless steel and 16 mm molybdenum
- Virtually all of the above-described ion sources can be combined with the analyzers
- There are ion optics for analyzing neutral particles as well as both positive and negative ions (SIMS)
- All types of detectors, i.e. Faraday cup, Faraday cup and SEM, Faraday cup and C-SEM, as well as ion counters, are available in various arrangements
- These mass spectrometers can be integrated into analysis systems with the aid of input /output modules
Module
Modules are special process monitoring or gas analysis devices that are equipped with various gas inlet systems and attached turbo drag pumps for evacuating the analyzer:
- The HPA 220 high-pressure analyzer, based upon the PrismaPlus
Process pressure up to 5 mbar - The SPM 220 sputter process monitor, based upon the PrismaPlus
Process pressure up to 10-2 mbar or 10 mba - The SPM 700 sputter process monitor, based upon the HiQuad
Process pressure same as SPM 220 - The EPD 700 is used to detect positive ions when etching in the gaseous phase and is based upon the HiQuad, Process pressure up to 10-2 mbar
Benchtop mass spectrometers
There are complete systems for process pressures of 1 bar; they are based upon the PrismaPlus:
- The OmniStar GSD 320 O with one gas inlet is used for quantitative gas analysis at atmospheric pressure with heated and temperature-regulated gas inlet systems
- The ThermoStar GSD 320 T is designed to be coupled with thermal scales These devices, or elements of them, are installed in complete devices by OEM customers
Page functions
-
Recommend this page!
-
Social Networks:
Contact
Address
Headquarters postal address
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
P.O. Box
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-1202