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4.1.2.5 Inlet system

Many vacuum technology processes that are monitored by mass spectrometers occur in pressure ranges of more than 10-4 mbar. Gases to be analyzed must also be relieved from atmospheric pressure to pressures of less than 10-4 mbar. Differing pressure reducing procedures are used, depending on the pressure gradient in question.

Gas mixtures should be admitted to the mass spectrometer without de-mixing if possible:

Table 4.3: Various gas inlet systems and their attributeszoom table
Table 4.3: Various gas inlet systems and their attributes

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