Pfeiffer Vacuum

2.1.8 Sealing gas

When pumping corrosive process gas, there is a risk that the gas might attack parts of the pump. To counter this danger, sensitive parts, e.g. bearings, must be protected by a continuous flow of inert gas. A special gas inlet system is installed in the pumps for this purpose, through which gas flows into the pumping system via the bearings. In this connection, it is necessary to ensure that the base pressure does not increase excessively.

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