Pfeiffer Vacuum

2.7.1 Design / Operating principle

The side channel high vacuum pump is a vacuum pump that works from atmosphere to the high vacuum range. The pump uses two operating principles to do this. In the upper pressure range (laminar flow range), the pump primarily works in accordance with the principle of a side channel vacuum pump, while working as a Holweck vacuum pump in the lower pressure range.

(Figure 2.16)
Figure 2.16: Operating principle of a side channel vacuum pump

The pumping system in a side channel vacuum pump (Figure 2.16) consists of a rotor disk (1) having blades (2) that are arranged on the outer perimeter and a ring-shaped working chamber, the side channel (3). The side channel is narrowed to the disk profile at one point by a breaker (4).

The pumping effect occurs through a helical flow from the inlet to the outlet that is produced by the blades of the rotating rotor. This results in a pressure differential between inlet (5) and outlet (6). Lower ultimate pressures can be attained by connecting multiple pumping stages in series. At pressures of between 1 and 20 mbar, the pump leaves the laminar flow range, and a Holweck stage (Figure 2.21) takes over displacement of the gas.To adapt to the pressure of the side channel pump stages, which is still quite high, the Holweck channels are small on the vacuum side and the gap is narrow. Larger channel cross sections are used toward the suction side in order to increase the pumping speed.

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