2.8.3.2 Magnetic-levitation turbopumps
With their high pumping speeds of over 1,500 l / s, magnetic-levitation turbopumps require large backing pumps. Since diaphragm pumps with base pressures of over 1 mbar are out of the question, these turbopumps are not equipped with Holweck stages. These pumps, too, are available as:
- Classical HiPace turbopumps offering pumping speeds of over 2,000 l / s with ISO-K flanges to generate high vacuum for standard applications, or
- with bakeable CF flanges to generate ultra high vacuum
- Classical HiPace-C turbopumps with coating and sealing gas system for corrosive gas applications
Figure 2.25:
HiPace™ MC magnetic-levitation turbopump
Table 2.15 below contains the performance data for the standard pumps. All other series are modifications of these standard models and essentially offer the same performance data.
Table 2.15:
HiPace™ performance data
The base pressures of standard pumps with ISO-K flanges are: pb < 1 · 10-7 mbar. Equipped with CF flanges, these pumps can attain base pressures of pb < 5 · 10-10 mbar after bake-out.
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-1202