Pfeiffer Vacuum A Passion for Perfection

3.3.1.2 ActiveLine

The ActiveLine family includes three control units and eight transmitters

The APR piezo transmitters cover five measurement ranges from 55 bar to 0.1 mbar with six transmitter models.

Capacitive CMR diaphragm-type transmitters are available in the form of both temperaturecompensated and temperature-regulated versions, in four or five measurement ranges each from 1,100 – 10-5 mbar. The use of diaphragms of differing thicknesses results in the following categories:

These ceramic-technology capacitive diaphragm vacuum gauges from Pfeiffer Vacuum have a proven track record in many, even corrosive applications.

The electrodes (anode, cathode, collector) in the sensor of the IMR 265 hot cathode transmitters are designed with extremely small clearances between one another.

(Figure 3.10)
Figure 3.10: ActiveLine application concepts

Molecular flow therefore prevails, even at pressures p of less than 10-2 mbar, enabling ion currents there to be measured. An additional advantage is its lower sensitivity to contamination than the Bayard-Alpert design. Moreover, there are two TPR Pirani transmitters and three IKR cold cathode transmitters with measuring ranges from 0.01 to 5 · 10-11 mbar.

The TPR 280 Pirani vacuum gauges can also be connected to DCU pumping station display control units, thus providing a pressure reading at no additional expense.

The following combination sensors are available

ActiveLine transmitters offer the following advantages:

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