Vacuum Solutions for Semiconductor Industry
Break through inventions like the transistor, of which there are millions on one of today’s integrated circuits, could not be developed and manufactured without vacuum technology. These semiconductor moduls are used, for eyample, in computers, mobile phones, digital cameras, MP3 and DVD players, flat panel displays, flash memories, automobiles and household electronics.
Pfeiffer Vacuum offers turbopumps, backing pumps, pumping stations and measurement equipment forthe following applications: Coating, CVD processes, lithography, etching, and implantation processes. Further application options include process chamber transfer, wafer transport or electron microscopy (SEM and SLM).
Pfeiffer Vacuum benefits with innovative and most reliable products from this positive development in this highly dynamic market segment.
Fields of application for our products:
- Lithography
- Metrology
- Chemical Vapor Deposition (CVD)
- Etching
- Physical Vapor Deposition (PVD)
- Ion Implanting
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
P.O. Box
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-1202