Pfeiffer Vacuum

Gas Analysis

Gas Analysis with Mass Spectrometer

Quadrupole mass spectrometers are excellent tools for analyzing gases ranging from high vacuum up to atmospheric pressure.

By measuring the mass-to-charge ratio of the gas components, a characteristic fingerprint is obtained of the gas that has been tested. Residual gas analysis delivers useful information about the condition of vacuum systems in a wide range of vacuum applications. Gas concentrations and the partial pressure of components of a gas mixture can also be identified by calibrating with test gases.

Quadrupole mass spectrometers require a working pressure of less than 1 • 10-4 hPa under high vacuum. To analyze gases at higher pressures, as are encountered in many vacuum processes, a perfectly coordinated system is required, consisting of a mass spectrometer, a gas inlet with a separation-free pressure reducing valve, vacuum pumping stations and total pressure measurement. With their quadrupole mass spectrometer-based products, Pfeiffer Vacuum provides the perfect solution for analyzing every gas in the ultra-high vacuum range right up to atmospheric pressure.

Owing to the modular design and the use of high-quality, proven components, these instruments can be ideally adapted to cope with practically every measuring task. Our product and applications specialists with their wealth of experience would be pleased to assist you in selecting a suitable analytical system for your particular application.

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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar

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Pfeiffer Vacuum GmbH
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35608 Asslar

T +49 6441 802-0
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