Residual gas analysis in high vacuum
Quadrupole mass spectrometers with Faraday detectors are the preferred devices for qualitative analysis of the gas composition in a high-vacuum chamber.
Compared with vacuum gauges, quadrupole mass spectrometers offer a much greater wealth of information about the vacuum. A Faraday detector is often sufficient to obtain information about leaks, the release of water vapor or contamination with hydrocarbons under high vacuum. For this purpose, Pfeiffer Vacuum offers a range of quadrupole mass spectrometers with a variety of mass ranges and cathode materials.
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-1202