Residual gas analysis in ultra high vacuum
Quadrupole mass spectrometers with a secondary electron multiplier offer maximum detection sensitivity in the qualitative analysis of gas composition in an ultra-high vacuum chamber.
For residual gas analysis under high vacuum, extremely small amounts of gas must be detected. A secondary electron multiplier in the Pfeiffer Vacuum residual gas analyzers therefore guarantees a high amplification of the small ion currents supplied by the quadrupole mass filters. All materials used are carefully selected for use in UHV and can withstand high bake-out temperatures.
Several ion sources are available for different applications, including a grid ion source with an extremely low outgassing rate.
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-1202