Ion Analysis
Externally generated ions, e.g. plasma processes, can be analysed with the help of a quadrupole mass spectrometer. Instead of ion sources, ion optics are used for these purposes.
Applications
- Ion beam analysis and plasma monitoring
Contact
Address
Headquarters postal address
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
P.O. Box
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-202