Ion analysis and plasma monitoring
Externally generated ions, e.g. plasma processes, can be analysed with the help of a quadrupole mass spectrometer. Instead of ion sources, ion optics are used for these purposes.
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-1202