A 1803 H
Based on the multi-stage Roots technology, the A 1803 H combines the A 203 H dry pump with a Roots pump of 1800 m3/h. The A 1803 H is fitted with energy efficient water cooled motors, temperature and N
Applications
- PECVD
- SACVD
- LPCVD
- ALD
- Epitaxy
- Etching
Customer value
- High reliability for extended lifetime
- Reduced cost of ownership
- Compact
- Easy maintenance
Product description
- Pumping speed 1700 m3/h
- Extensive monitoring of critical parameters
- 208 V to 480 V power supply
- Large volume option available
Product
Note
Other versions available, please consult us.
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Address
Headquarters postal address
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
P.O. Box
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-1202
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