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Multi-stage Roots Pumps for Harsh Duty Applications

Multi-stage Roots Pumps - Pfeiffer Vacuum

The dry process pumps of the A3H series are energy and cost efficient solutions for demanding processes in the semiconductor and coating industry.

What are harsh duty processes?
Harsh processes are chemical coating processes, e.g. in the semiconductor and solar industry. These processes are harsh, because primarily aggressive and corrosive mediums are used and processed under vacuum. These mediums have the highest requirements for the design and quality of the process systems. Typical harsh duty processes are etching and chemical vapor deposition (CVD).

The right equipment is crucial
Since aggressive and corrosive chemicals are used in harsh duty processes, the vacuum pumps and components must be corrosion resistant. For applications in the semiconductor and solar industry, there is frequently an increased occurrence of powder, which may lead to deposits in the vacuum pumps. Thus, it must be made sure that the process pumps in use are suitable for this amount of powder. In order to best avoid condensation in the pumps, purge gas is used with a high gas throughput in combination with a sophisticated temperature management.

Process pumps by Pfeiffer Vacuum for harsh duty applications
With the A3H series, Pfeiffer Vacuum offers pump solutions for the most demanding processes of the semiconductor and coating industry. The series is based on the proven technology of the dry multi-stage roots pumps. Through the usage of corrosion-resistant materials and a high gas throughput, the pump series is optimal for usage in demanding CVD processes.
A high particle tolerance and condensation resistance distinguishes the pumps of the A3H series. Their compact and modular construction allows for space-saving integration in existing systems. Long maintenance intervals and low energy consumption provide for low operating costs.

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