A 1003 P
Based on the multi-stage Roots technology, the A 1003 P combines the A103 P dry pump with a Roots pump of 900 m3/h. The A 1003 P is fitted with energy efficient water cooled motors, temperature and N
Applications
- Etching (Oxide & poly)
- Ashing
- Stripping
- RTP
- Implant
Customer value
- Low cost of ownership
- Low footprint
- Light for easier installation
- High reliability on medium applications
- Compatible with Semiconductor Fabs requirement
Product description
- Pumping speed 900 m3/h
- Extensive monitoring of critical parameters
- 200 V to 480 V power supply
Product
Note
Other versions available, please us.
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Address
Headquarters postal address
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
P.O. Box
Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany
T +49 6441 802-0
F +49 6441 802-1202
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