Pfeiffer Vacuum

A3P Series

Multi-stage Roots Pumps for Medium Duty Applications

Dry pumps from the A3P series: advanced technology with high energy efficiency for medium duty processes

A3P series dry pumps reduce operating costs
With the pumps from the A3P series, Pfeiffer Vacuum offers a pump series from three models, which are distinguished through drastically reduced operating costs. Compared to previous pump technologies, energy savings of up to 50% are possible. The pumps integrate the most modern knowledge for process suitability. Furthermore, they allow for a saving in space of up to 50% compared to previous pumps through its compact construction.

Dry pumps for the semiconductor industry
The dry pumps of the A3P series are based on the proven multi-stage Roots technology. The inside of the pumps is resistant to corrosive gases. For this reason, the pumps have high reliability on medium duty processes. The three available models from the series offer a wide spectrum of pumping speeds and thereby cover most requirements for medium duty vacuum pumps in the semiconductor industry. The A3P series is suitable for operation in a clean room and complies with CE and Semi S2 standards.

Designed for high reliability on medium duty processes
The dry pumps are distinguished through their high reliability for applications in medium duty processes. The pumps from the series have a temperature sensor and inert gas flushing. A low noise emission and low vibration level are further characteristics of the A3P series.


  • Low operating costs
  • Small footprint
  • Light weight for simpler assembly
  • High reliability in medium duty applications
  • Compatible with the requirements for semiconductor production


  • Semiconductor industry (etching, implant, PVD, ...)
  • Photovoltaic
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar

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Pfeiffer Vacuum GmbH
Postfach 1280
35608 Asslar

T +49 6441 802-0
F +49 6441 802-1202

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