Pfeiffer Vacuum


Dry Roots Pumping Stations - Pfeiffer Vacuum

Dry Roots Pumping Stations

Pfeiffer Vacuum supplies dry roots pumping stations which combine roots pumps with multi-stage backing pumps. The high pumping speeds afforded by these pumping stations enable a low end pressure to be achieved.

Dry roots pumping stations are state-of-the-art solutions for demanding industrial processes, such as the semiconductor industry. Pumping stations with reduced protective equipment can be used where process requirements are less stringent, for instance in load lock applications or as backing pumps for sputtering processes. We can supply everything from solutions for small vacuum chambers right up to maximum throughput in solar technology and display panel manufacturing.


  • Dry, oil-free suction chamber
  • These solutions provide an optimized pump capacity coupled with high reliability


  • Coatings
  • Metallurgy
  • Vacuum drying
  • Degassing
  • Photovoltaics
  • Research & Development
  • Chemical industry
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Headquarters postal address

Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar

P.O. Box

Pfeiffer Vacuum GmbH
Postfach 1280
35608 Asslar

T +49 6441 802-0
F +49 6441 802-1202

Copyright © 2015 Pfeiffer Vacuum GmbH