Pfeiffer Vacuum A Passion for Perfection

Side Channel Pumps

Side Channel Pumps - Pfeiffer Vacuum

The High-Vacuum Pump that Works Against Atmosphere!

With its performance and compact design, the OnTool Booster is setting standards in vacuum technology.

It is characterized by an extremely high pumping speed of 130 m3/h and an ultimate pressure of < 1 · 10-5 hPa The OnTool Booster is the perfect solution for clean applications in coating, the semiconductor industry or research and development – without any particles, corrosive gases or condensation. It can be employed in a wide variety of applications, either as a stand-alone pump or as a backing pump for turbopumps.

Customer benefits

  • Innovative - High-vacuum directly against atmosphere
  • Cost-effective - No backing pump required
  • Compact - Can be connected directly to the tool
  • Particle-free - For all clean applications
  • Variable - Can be used as either a stand-alone or backing pump
  • Short cycle times - Optimized for a low transfer pressure
  • Powerful - Extremely high pumping speed of 130 m3/h
  • Flexible - High-vacuum flange in 3 positions

Applications

  • Transfer chambers
  • Load-lock chambers
  • EUV lithography
  • Solar cell coating
  • Optical coating
  • Surface finishing
  • Simulation chambers
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Pfeiffer Vacuum GmbH
Berliner Strasse 43
35614 Asslar
Germany

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Pfeiffer Vacuum GmbH
Postfach 1280
35608 Asslar
Germany

T +49 6441 802-0
F +49 6441 802-1202
info@pfeiffer-vacuum.de

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