Side Channel Pumps

The High-Vacuum Pump that Works Against Atmosphere!

With its performance and compact design, the OnTool Booster is setting standards in vacuum technology.

It is characterized by an extremely high pumping speed of 130 m³/h and an ultimate pressure of < 1 · 10^-5 mbar. The OnTool Booster is the perfect solution for clean applications in coating, the semiconductor industry or research and development – without any particles, corrosive gases or condensation. It can be employed in a wide variety of applications, either as a stand-alone pump or as a backing pump for turbopumps.

Advantages

Innovative - High-vacuum directly against atmosphere
Cost-effective - No backing pump required
Compact - Can be connected directly to the tool
Particle-free - For all clean applications
Variable - Can be used as either a stand-alone or backing pump
Short cycle times - Optimized for a low transfer pressure
Powerful - Extremely high pumping speed of 130 m³/h
Flexible - High-vacuum flange in 3 positions

Applications

Transfer chambers
Load-lock chambers
EUV lithography
Solar cell coating
Optical coating
Surface finishing
Simulation chambers

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