HiPace™ MC

Magnetically Levitated Turbopumps with Integrated Drive Electronics.

HiPace MC is a line of magnetically levitated turbopumps with integrated drive electronics that operate at the maximum performance level. This not only applies with respect to their especially high pumping speeds, high compression and high gas throughput. Their magnetically levitated bearings, which assure extremely low vibration and maintenance-free operation, are the embodiment of top class technology.

The innovative principle of integrated drive electronics finally avoids cumbersome and costly cabling. Moreover, the HiPace MC turbopumps are extremely robust and suitable for industrial applications. Another positive feature that should be mentioned is their integrated water cooling, which assures optimum heat dissipation for the pump and electronics.

Advantages

Integrated drive electronics eliminate the need for cumbersome and costly cabling
Suitable for most applications thanks to high pumping speed and high gas throughput
Extremely low vibration and noise for sensitive applications
Highly reliable thanks to permanent rotor monitoring
Robust, long-life safety bearing concept
Water cooling affords long service life of electronic components
Patented centering ring with anti-slip coating to enhance system reliability
5-axis active magnetic bearing
Any desired installation orientation
Profibus and DeviceNet interfaces (optional)
Semi S2, F47 and E74 certification

Applications

Semiconductor Industry
- EUV lithography
- Chemical vapor deposition (CVD)
- Physical vapor deposition (PVD)
- Ion beam etching
- Ion implantation

Research & Development
- Physical equipment
- Space simulation

Coating
- Glass coating
- Thin films
- Ophthalmics
- Solar cell coating

Industrial
- Metallurgy
- Electron beam welding

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