- Compact yet powerful turbopump with a pumping speed of up to 685 l/s for N2
- Maximum vacuum performance with minimum power consumption
- For installation in any orientation
- Integrated TC 400 drive electronics
- Integrated, powerful cooling system
Bearing | Hybrid |
Compression ratio for Ar | > 1 · 1011 |
Compression ratio for H2 | 4 · 105 |
Compression ratio for He | 3 · 107 |
Compression ratio for N2 | > 1 · 1011 |
Connection flange (in) | DN 160 ISO-K |
Connection flange (out) | DN 25 ISO-KF/G ¼" |
Cooling method | Water |
Cooling method, optional | Air |
Cooling water flow | 100 l/h |
Cooling water flow, max. | 100 l/h |
Cooling water flow, min. | 100 l/h |
Cooling water temperature | 15-35 °C | 59-95 °F | 288-308 K |
Current, max. | 8,4 A |
Electronic drive unit | with TC 400 |
Final pressure | 1 · 10-7 hPa | 7.5 · 10-8 Torr | 1 · 10-7 mbar |
Final pressure without gas ballast | 1 · 10-7 hPa | 7.5 · 10-8 Torr | 1 · 10-7 mbar |
Fore-vacuum max. for N2 | 11 hPa | 8.25 Torr | 11 mbar |
Gas throughput at final rotation speed for Ar | 3.5 hPa·l/s |
Gas throughput at final rotation speed for H2 | > 14 hPa·l/s |
Gas throughput at final rotation speed for He | 20 hPa·l/s |
Gas throughput at final rotation speed for N2 | 6.5 hPa·l/s |
I/O interfaces | RS-485, Remote |
Interfaces, extended | Profibus DeviceNet E74 |
Mounting orientation | Arbitrary |
Permissible radial magnetic field max. | 6 mT |
Power consumption max. | 420 W |
Protection degree | IP54 |
Pumping speed for Ar | 665 l/s |
Pumping speed for H2 | 555 l/s |
Pumping speed for He | 655 l/s |
Pumping speed for N2 | 685 l/s |
Rotation speed ± 2 % | 49,200 rpm | 49,200 min-1 |
Rotation speed variable | 60 – 100 % |
Run-up time | 2 min |
Sound pressure level | ≤50 dB(A) |
Venting connection | G 1/8" |
Weight | 11.5 kg | 25.35 lb |