Intelligent
State-of-the-art communication protocols adapted to process requirements
Compact
Easy integration on tools or in sub-floor areas thanks to adjustable inlet position
High performance
Low ultimate pressure, high throughput
Technical specifications
Markets & applications
Automotive and Transport
-
Leak Detection and EoL Testing
Battery
-
Leak Detection and EoL Testing (Master)
Dairy
-
Cheese Production - Cheese vacuum chambers
-
Cheese production - cheese towers
-
Butter
Hydrogen Economy
-
Leak Detection and EoL Testing (Master)
Power Generation
-
Green Energy Generation
R&D
-
Photonics Research
Refrigeration and Air Condition
-
Leak Detection and EoL Testing
Semiconductor
-
Inspection & Metrology
-
Lithography
-
Load Lock & Transfer