Pfeiffer Vacuum


Total pressure vacuum gauge with analog signal outlet
The ActiveLine series offers a wide range of vacuum gauges that work on a variety of measuring principles and have a classic analog outlet. The series thus covers the technically relevant vacuum range from ultra-high vacuum to overpressure. The outlet voltage of the transmitter, that is proportional to the pressure, can be displayed as pressure on the three controllers or read into controllers through analog inputs for further processing.

The series includes high precision capacitance vacuum gauges in SI units (CMR) for process monitoring and control as well as corresponding Torr types (CCR) for direct use in semiconductor processes without controllers.

Customer benefits

  • Covers the entire vacuum range
  • Suitable for all requirement profiles
  • Space saving installation due to compact design
  • Optimum cost-benefit ratio
  • Universally usable due to integrated electronic drive unit
  • Easy self-diagnosis
  • Avoids installation errors through controllers with automatic transmitter recognition
  • Easy wiring for all transmitters through uniform standard cables


  • Research facilities
  • Analysis equipment
  • Research and production coating facilities
  • Leak detection systems
  • Semiconductor development and production
  • Photovoltaics
  • Industrial vacuum process systems

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