Pfeiffer Vacuum

Multi-stage Roots Pumps for Harsh Duty Applications

The dry process pumps of the A4 series are energy and cost efficient solutions for demanding processes in the semiconductor and coating industries.

What are harsh duty processes?
Harsh processes are chemical processes used in the semiconductor and coating industries. These processes are harsh, because primarily aggressive and corrosive mediums are used and processed under vacuum. These mediums have the highest requirements for the design and quality of the process systems. Typical harsh duty processes are etching and chemical vapor deposition (CVD).

Choosing the right version for your application
Two versions of the range are available. A4H pump models are suited for all processes where non- or limited corrosive chemistry is present. For the most corrosive applications, the A4X pump models include corrosion resistant materials to extend lifetime and reduce cost of ownership.

The right equipment is crucial
Since aggressive and corrosive chemicals are used in harsh duty processes, the vacuum pumps and components must be corrosion resistant. For applications in the semiconductor and coating industries, there is frequently an increased occurrence of powder, which may lead to accumulation in the vacuum pumps. Thus, it must be made sure that the process pumps in use are suitable for this amount of powder. In order to best avoid condensation in the pumps, purge gas is used in combination with a sophisticated temperature management.

Process pumps by Pfeiffer Vacuum for harsh duty applications
With the A4 series, Pfeiffer Vacuum offers pump solutions for the most demanding processes of the semiconductor and coating industries. The series is based on the proven technology of the dry multi-stage Roots pumps. A high particle tolerance and condensation resistance distinguishes the pumps of the A4 series. Their compact and modular construction allows for space-saving integration in existing systems. Long maintenance intervals and low energy consumption provide for low operating costs.



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