Pfeiffer Vacuum

Backing pump control

HiPace turbopumps afford meaningful control of backing pumps. Pumping station control is effected via TC 110, TC 400, TC 1200 and TM 700 as well as TCP 350. Parameter setting with DCU. Process adaptation performed in interval mode.

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Your local contact

Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T: +1 (800) 248-8254
F: +1 (888) 658-7983

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