Pfeiffer Vacuum

HiPace® 300 C with TC 400, DN 100 ISO-K

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Overview
  • Rugged, powerful turbopump with a pumping speed of up to 245 l/s for N2
  • Integrated TC 400 drive electronics
  • Ideal for coating and semiconductor applications
  • With integrated water cooling for maximum gas throughput
  • Flexible through the ability to employ up to 4 accessories
  • Ideal for fast cycles
  • Extensive accessories expand the range of applications
  • Corrosive gas version

Product view

PM P03 906
Order number: PM P03 906
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Technical data
Bearing Hybrid
Compression ratio for Ar > 1 · 107
Compression ratio for H2 3 · 102
Compression ratio for He 2.2 · 104
Compression ratio for N2 > 1 · 106
Cooling method, optional Air
Cooling method, standard Water
Cooling water consumption 50 l/h
Cooling water temperature 15-35 °C | 59-95 °F | 288-308 K
Corrosive gas version YES
Electronic drive unit with TC 400
Flange (in) DN 100 ISO-K
Flange (out) DN 16 ISO-KF/G ¼"
Fore-vacuum max. for N2 1 hPa | 0.75 Torr | 1 mbar
Gas throughput at full rotational speed for Ar 4.4 hPa l/s | 3.3 Torr l/s | 4.4 mbar l/s
Gas throughput at full rotational speed for H2 > 50 hPa l/s | > 37.5 Torr l/s | > 50 mbar l/s
Gas throughput at full rotational speed for He > 20 hPa l/s | > 15 Torr l/s | > 20 mbar l/s
Gas throughput at full rotational speed for N2 17 hPa l/s | 12.75 Torr l/s | 17 mbar l/s
Interfaces RS-485, Remote
Mounting orientation Standard (0°-90°)
Operating voltage 24 (± 5 %) V DC
Particulate matter YES
Permissible magnetic field max. 5.5 mT
Protection category IP54
Pumping speed for Ar 250 l/s
Pumping speed for H2 125 l/s
Pumping speed for He 220 l/s
Pumping speed for N2 245 l/s
Pumping speed range 300 l/s
Rotation speed ± 2 % 60,000 rpm | 60,000 min-1
Rotation speed variable 35 - 100 %
Run-up time 1.2 min
Sound pressure level ≤ 50 dB(A)
Ultimate pressure according to PNEUROP < 1 · 10-7 hPa | < 7.5 · 10-8 Torr | < 1 · 10-7 mbar
Venting connection G 1/8"
Weight 6.4 kg | 14.11 lb
Accessories
Mains cables
RS-485 accessories
Connector M12 to RS-485 (PM 061 270 -X)
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Adapters / connections TC 400/1200 and TM 700
Vibration damper
Centering ring with multifunctional coating
Centering ring with multifunctional coating, including protection screen
Centering ring with multifunctional coating, including splinter shield
Mounting kits for HiPace, including coated centering ring and bracket screws
Mounting kits for HiPace, including coated centering ring, splinter shield and bracket screws
Mounting kits for HiPace, including coated centering ring, protection screen and bracket screws
Venting accessory with small flange, G 1/8", hoses, air drier
Banjo fitting (PM 016 787 -T)
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Banjo fitting, small (PM 143 877 -T)
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Control and display units
Accessory for DCU/HPU
Accessories RS-485
Mains pack for wall/standard rail fitting
Mains pack 19" rack module 3HU with front panel
Connection cables
Relay boxes suitable for TC 110, TC 400 and TCP 350
Wall rail fitting
Front panel kit as spare part
Front panel kit for TPS 311 (PM 061 395 -T)
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Adapter and control cables
Extension cables
Extension cable M12 on M12 (PM 061 747 -T)
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Interface cables
Shielded relay boxes suitable for TC 110/TC 400 with PB, TC 1200 and TM 700
DCU with integrated power supply
Fore-vacuum safety valves
Venting valve (normally closed)
Air coolings (unshielded)
Air coolings 115/230 V
Sealing gas valve, shielded (normally closed)
Sealing gas throttle
Power failure venting units (normally open)
Pressure Sensors
Mounting kit with collar flange, coated centering ring, Hexagon bolts
Mounting kit with collar flange, coated centering ring with splinter shield, hexagon bolts
Mounting kit with collar flange, coated centering ring with protection screen, hexagon bolts
DN ISO-K/-F Mounting kit with collar flange, coated centering ring, stud screws
Mounting kit with collar flange, coated centering ring with splinter shield, stud screws
Mounting kit with collar flange, coated centering ring with protection screen, stud screws
Sealing gas monitoring unit
Dimensions

Massbild-TIM-RS

Characteristic

Kennlinie-TIM-RS-1

Downloads
File Type Language Date Filesize Action
Data sheet PDF EN 11-17-2017 ~ 600.3 KB Download
Stepfile STP EN 06-23-2010 ~ 2.5 MB Download

File Type Language Date Filesize Action
Operating instructions TC 400, Electronic drive unit for HiPace (PT0203BEN_S) PDF EN 10-26-2017 ~ 2.7 MB Download
Operating instructions HiPace 300 C (PT0201BEN_G) PDF EN 10-26-2017 ~ 4.2 MB Download
Software TurboViewer ZIP EN 06-17-2015 ~ 29.9 MB Download
Software Pfeiffer Vacuum LabView Driver 2014 ZIP EN 10-07-2016 ~ 2.2 MB Download

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Your local contact

Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T: +1 (800) 248-8254
F: +1 (888) 658-7983

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