Pfeiffer Vacuum

ATH 2300 M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 2150 l/s for N2

Product description

  • Operation with integrated OBC drive electronics or Magpower external drive electronics
  • Installation in any orientation
  • Water cooled
  • CE marked and ROHS compliant
  • Heated version (MT) available for corrosive applications.
  • ATH-M mid size turbomolecular pump in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN200 and DN250 flange size.


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Your local contact

Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua

T: +1 (800) 248-8254
F: +1 (888) 658-7983

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