Pfeiffer Vacuum

ATH 500 M, DN 100 ISO-F, Profibus, Water cooled, Non-heated

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Overview
  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 350 l/s for N2
  • DN 100 ISO-F inlet flange
  • Compact integrated drive electronics
  • Installation in any orientation
  • Profibus, Water cooled, Non-heated
  • CE marked and ROHS compliant

Product view

VY362100
Order number: VY362100
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Technical data
Bearing Magnetically Levitated
Compression ratio for Ar > 8 · 106
Compression ratio for H2 > 2 · 102
Compression ratio for He > 1 · 104
Compression ratio for N2 > 2 · 107
Cooling method, optional Air
Cooling method, standard Water
Cooling water consumption 1 l/min
Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K
Electronic drive unit Integrated drive electronics
Flange (in) DN 100 ISO-F
Flange (out) DN 25 ISO-KF
Fore-vacuum max. for N2 2.6 hPa | 1.95 Torr | 2.6 mbar
Gas throughput for Ar 42.3 hPa l/s | 31.73 Torr l/s | 42.3 mbar l/s
Gas throughput for H2 > 169 hPa l/s | > 126.75 Torr l/s | > 169 mbar l/s
Gas throughput for He > 169 hPa l/s | > 126.75 Torr l/s | > 169 mbar l/s
Gas throughput for N2 67.6 hPa l/s | 50.7 Torr l/s | 67.6 mbar l/s
Interfaces Profibus
Mounting orientation in any orientation
Operating voltage 48 (± 5 %) V DC
Power consumption at ultimate pressure 100 W
Pumping speed for Ar 320 l/s
Pumping speed for H2 170 l/s
Pumping speed for He 310 l/s
Pumping speed for N2 350 l/s
Rotation speed ± 2 % 50,000 rpm | 50,000 min-1
Run-up time < 2 min
Ultimate pressure < 1 · 10-8 hPa | < 7.5 · 10-9 Torr | < 1 · 10-8 mbar
Weight 17 kg | 37.48 lb
Accessories
Dimensions

Massbild-TIM-RS

H
294.5 mm
Characteristic

Kennlinie-TIM-RS-1

Kennlinie-TIM-RS-2

Downloads
File Type Language Date Filesize Action
Data sheet PDF EN 09-19-2017 ~ 612.5 KB Download

File Type Language Date Filesize Action
Operating instructions ATH 500 M (114436EN_04) PDF EN 02-08-2013 ~ 6.6 MB Download

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Your local contact

Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T: +1 (800) 248-8254
F: +1 (888) 658-7983

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