Mineral oils or mixtures of mineral and synthetic oils are adequate for most applications. If there is a possibility of vapors condensing in the pump, oil with anti-emulsifier can be used. This prevents mixing of oil and water, within certain limits. Double-distilled mineral oils reduce the oil backflow. They are resistant against corrosive gases and ionizing plasma.
Perfluoropolyether lubricants are the most chemically stable operating fluids for vacuum pumps. They are suitable for pumping oxygen, ozone, halogens, organic and inorganic solvents, HCL, BF3, HF, PO3 and fluorine.
Diester lubricants are suitable for temperatures up to 120 °C. They are resistant against slightly corrosive media such as low concentrations of solvents. Keep in mind that the achievable final pressure for two-stage pumps generally are around a decade higher than when mineral oil is used.
Pfeiffer Vacuum offers various operating fluids (vacuum oils) for rotary vane pumps. The use of operating fluids that match your process considerably extends the life of the pump. Straightforward mineral oils cover applications such as pumping air or inert gases, and water vapor. Mineral oils which have been distilled several times are resistant even to chemical attack or ionizing plasma in demanding applications. Diester are suitable for temperatures of up to 120°C. Perfluoropolyethers (PFPE) are chemically inert and are suitable for processes involving corrosive chemicals, such as in the semiconductor and thin-layer industry, and for media with an oxygen content exceeding 21%.
Please feel free to contact us if you would like a detailed consultation about applications.