Pfeiffer Vacuum offers various operating fluids (vacuum oils) for rotary vane pumps. The use of operating fluids that match your process considerably extends the life of the pump. Straightforward mineral oils cover applications such as pumping air or inert gases, and water vapor. Mineral oils which have been distilled several times are resistant even to chemical attack or ionizing plasma in demanding applications. Diesters are suitable for temperatures of up to 120°C. Perfluoropolyethers (PFPE) are chemically inert and are suitable for processes involving corrosive chemicals, such as in the semiconductor and thin-layer industry, and for media with an oxygen content exceeding 21%.
Please feel free to contact us if you would like a detailed consultation about applications.