HiPace® 2800 IT

Powerful turbopumps with pumping speed up to 2800 l/s.

Product description

• Ideal for ion implantation systems
• Optimized pumping speed for light gases
• The nickel-plated rotor guarantees resistivity to the dopants used
• The intelligent temperature management system reduces process condensation and deposits
• Semi S2 and UL/CSA certification

Product