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PM P03 906
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HiPace® 300 C with TC 400, DN 100 ISO-K
Order number: PM P03 906

  • Rugged, powerful turbopump with a pumping speed of up to 245 l/s for N2
  • Integrated TC 400 drive electronics
  • Ideal for coating and semiconductor applications
  • With integrated water cooling for maximum gas throughput
  • Flexible through the ability to employ up to 4 accessories
  • Ideal for fast cycles
  • Extensive accessories expand the range of applications
  • Corrosive gas version
Bearing Hybrid
Compression ratio for Ar > 1 · 107
Compression ratio for H2 3 · 102
Compression ratio for He 2.2 · 104
Compression ratio for N2 > 1 · 106
Cooling method, optional Air
Cooling method, standard Water
Cooling water consumption 50 l/h
Cooling water consumption, max 50 l/h
Cooling water consumption, min 50 l/h
Cooling water temperature 15-35 °C | 59-95 °F | 288-308 K
Corrosive gas version YES
Electronic drive unit with TC 400
Flange (in) DN 100 ISO-K
Flange (out) DN 16 ISO-KF/G ¼"
Fore-vacuum max. for N2 1 hPa | 0.75 Torr | 1 mbar
Gas throughput at full rotational speed for Ar 4.4 hPa·l/s
Gas throughput at full rotational speed for H2 > 50 hPa·l/s
Gas throughput at full rotational speed for He > 20 hPa·l/s
Gas throughput at full rotational speed for N2 17 hPa·l/s
Interfaces RS-485, Remote
Mounting orientation Standard (0° – 90°)
Operating voltage: V DC 24 (± 5 %) V DC
Particulate matter YES
Permissible magnetic field max. 5.5 mT
Protection category IP54
Pumping speed for Ar 250 l/s
Pumping speed for H2 125 l/s
Pumping speed for He 220 l/s
Pumping speed for N2 245 l/s
Rotation speed ± 2 % 60,000 rpm | 60,000 min-1
Rotation speed variable 35 – 100 %
Run-up time 1.2 min
Sound pressure level ≤ 50 dB(A)
Ultimate pressure according to PNEUROP < 1 · 10-7 hPa | < 7.5 · 10-8 Torr | < 1 · 10-7 mbar
Venting connection G 1/8"
Weight 6.4 kg | 14.11 lb

Dimension-TIM-RS

Characteristic-TIM-RS-1

File Type Language Date Filesize
Data sheet PDF EN 10-20-2018 ~ 599.5 KB
Stepfile STP EN 06-23-2010 ~ 2.5 MB
File Type Language Date Filesize
Operating instructions TC 400, Electronic drive unit for HiPace (PT0203BEN_S) PDF EN 10-26-2017 ~ 2.7 MB
Operating instructions HiPace 300 C (PT0201BEN_G) PDF EN 10-26-2017 ~ 4.2 MB
Operating instructions HiCube - Turbo Pumping Stations PDF EN 07-30-2018 ~ 944.9 KB
Software TurboViewer (Version 010400) ZIP EN 06-28-2018 ~ 29.9 MB
Software LabView Driver 2014 (Pfeiffer Vacuum) ZIP EN 06-28-2018 ~ 2.2 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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