ATH 230x M
5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 2150 l/s for N2
Product description
- Operation with integrated OBC electronic drive unit or external Magpower electronic drive unit
- Installation in any orientation
- Water cooled
- CE marked and ROHS compliant
- Heated version (MT) available for corrosive applications.
- ATH-M mid size turbomolecular pump in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN200 and DN250 flange size
Product
- ATH 2300 MT, DN 250 CF-F, external drive electronics, water-cooled, heated (Q6622100)
- ATH 2300 MT, DN 250 ISO-F, external drive electronics, water-cooled, heated (Q6662100)
- ATH 2303 M, DN 250 ISO-F, with integrated drive electronics OBC V4, remote, water-cooled, non-heated (TMBBA662405A)
- ATH 2303 M, DN 250 ISO-F, with integrated drive electronics OBC V4, Profibus, water-cooled, non-heated (TMBBB662405A)
