ATH 230x M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 2150 l/s for N2

Product description

  • Operation with integrated OBC electronic drive unit or external Magpower electronic drive unit
  • Installation in any orientation
  • Water cooled
  • CE marked and ROHS compliant
  • Heated version (MT) available for corrosive applications.
  • ATH-M mid size turbomolecular pump in world reference in semiconductor and coating industry. World wide large installation base in light process to harsh process for DN200 and DN250 flange size

Product

Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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