ATH 2804 M

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 2350 l/s for N2

Product description

  • Operation with integrated drive electronics
  • Installation in any orientation
  • Water cooled
  • CE marked and ROHS compliant
  • Heated version (MT) available for corrosive applications
  • ATH-M large size turbomolecular pump has been introduced for silicon based industry applications, based on long experience for DN 250 flange size


Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua

+1 (800) 248-8254
+1 (888) 658-7983
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