Product Selector
Magnetgelagerte Turbopumpen - Pfeiffer Vacuum

QR-Code

VY362100
Similar Image

ATH 500 M, DN 100 ISO-F, Profibus, Water cooled, Non-heated
Order number: VY362100

  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 350 l/s for N2
  • DN 100 ISO-F inlet flange
  • Compact integrated drive electronics
  • Installation in any orientation
  • Profibus, Water cooled, Non-heated
  • CE marked and ROHS compliant
Bearing Magnetically Levitated
Compression ratio for Ar > 8 · 106
Compression ratio for H2 > 2 · 102
Compression ratio for He > 1 · 104
Compression ratio for N2 > 2 · 107
Cooling method, optional Air
Cooling method, standard Water
Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K
Electronic drive unit Integrated drive electronics
Flange (in) DN 100 ISO-F
Flange (out) DN 25 ISO-KF
Fore-vacuum max. for N2 2.6 hPa | 1.95 Torr | 2.6 mbar
Gas throughput for Ar 42.3 hPa·l/s
Gas throughput for H2 > 169 hPa·l/s
Gas throughput for He > 169 hPa·l/s
Gas throughput for N2 67.6 hPa·l/s
Interfaces Profibus
Mounting orientation in any orientation
Operating voltage: V DC 48  V DC
Power consumption at ultimate pressure 100 W
Pumping speed for Ar 320 l/s
Pumping speed for H2 170 l/s
Pumping speed for He 310 l/s
Pumping speed for N2 350 l/s
Rotation speed ± 2 % 50,000 rpm | 50,000 min-1
Run-up time < 2 min
Sound pressure level ≤ 42 dB(A)
Ultimate pressure < 1 · 10-8 hPa | < 7.5 · 10-9 Torr | < 1 · 10-8 mbar
Weight 17 kg | 37.48 lb

Massbild-TIM-RS

H
294.5 mm

Kennlinie-TIM-RS-1

Kennlinie-TIM-RS-2

File Type Language Date Filesize
Data sheet PDF EN 07-21-2018 ~ 612.3 KB
File Type Language Date Filesize
Operating instructions ATH 500 M (1144360EN_06) PDF EN 06-12-2018 ~ 4 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
write message

This website uses cookies to ensure you get the best experience on our website. More info