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Magnetgelagerte Turbopumpen - Pfeiffer Vacuum

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VY362100

ATH 500 M, DN 100 ISO-F, Profibus, Water cooled, Non-heated
Order number: VY362100

  • 5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 350 l/s for N2
  • DN 100 ISO-F inlet flange
  • Compact integrated drive electronics
  • Installation in any orientation
  • Profibus, Water cooled, Non-heated
  • CE marked and ROHS compliant
Bearing Magnetically Levitated
Compression ratio for H2 > 2 · 102
Compression ratio for N2 > 2 · 107
Cooling method, standard Water
Electronic drive unit Integrated drive electronics
Flange (out) DN 25 ISO-KF
Gas throughput for Ar 42.3 hPa·l/s
Gas throughput for He > 169 hPa·l/s
Interfaces Profibus
Operating voltage: V DC 48 (5) V DC
Pumping speed for Ar 320 l/s
Pumping speed for He 310 l/s
Rotation speed ± 2 % 50,000 rpm | 50,000 min-1
Sound pressure level ≤ 42 dB(A)
Weight 17 kg | 37.48 lb
Compression ratio for Ar > 8 · 106
Compression ratio for He > 1 · 104
Cooling method, optional Air
Cooling water temperature 15-25 °C | 59-77 °F | 288-298 K
Flange (in) DN 100 ISO-F
Fore-vacuum max. for N2 2.6 hPa | 1.95 Torr | 2.6 mbar
Gas throughput for H2 > 169 hPa·l/s
Gas throughput for N2 67.6 hPa·l/s
Mounting orientation in any orientation
Power consumption at ultimate pressure 100 W
Pumping speed for H2 170 l/s
Pumping speed for N2 350 l/s
Run-up time < 2 min
Ultimate pressure < 1 · 10-8 hPa | < 7.5 · 10-9 Torr | < 1 · 10-8 mbar

Massbild-TIM-RS

H
294.5 mm

Kennlinie-TIM-RS-1

Kennlinie-TIM-RS-2

Power cord

Power cord 2.0 m Europe standard 200 - 240 V AC 48 VDC power supply (for ATH500M) 103566
Power cord 2.0 m US standard 200 - 240 V AC 48 VDC power supply (for ATH500M) 103567
Power cord 3.5 m 48 V DC (for ATH 500 M) A331328-035

Electronic controllers

Hand Held Remote (HHR) with cable 114461
External power supply for ATH 500 M/MT 114866

Venting valves and other accessories

Purge plug with O-ring (for ATH 500 M) 115298S
Purge valve kit 24 DVC (for ATH 500 M) 115303S
Air cooling kit (for ATH 500 M) 118543S
Air venting valve (for ATH 500 M) 200043

Inlet screen

Stainless inlet screen kit for DN 100 118001
File Type Language Date Filesize
Data sheet PDF EN 05-25-2018 ~ 612.3 KB
File Type Language Date Filesize
Operating instructions ATH 500 M (114436EN_04) PDF EN 02-08-2013 ~ 6.6 MB
Your local contact
Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

+1 (800) 248-8254
+1 (888) 658-7983
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