Pfeiffer Vacuum

EVR 116, Gas regulating valve, motorized

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Overview
  • High gas throughput
  • Very broad regulating range
  • With integrated motor control electronics

Product view

PF I39 931
Order number: PF I39 931 A
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Technical data
Ambient temperature 5 - 40 °C
Bakeout temperature: housing 80 °C | 176 °F | 353 K
Closing/opening time < 3 / 4 s
Control RVC 300 or IF 200
Control voltage 0-10 V DC
Dosing sleeve Fluorplastomer
Flange (in) DN 16 ISO-KF
Flange (out) DN 16 ISO-KF
Gas flow max. controllable 1.25 · 103 hPa l/s | 9.38 · 102 Torr l/s | 1.25 · 103 mbar l/s
Gas flow min. controllable 5 · 10-6 hPa l/s | 3.75 · 10-6 Torr l/s | 5 · 10-6 mbar l/s
Housing/needle/filter Stainless steel
Operating pressure max. 2500 hPa (abs.)
Operating pressure min. 1 · 10-8 hPa | 7.5 · 10-9 Torr | 1 · 10-8 mbar
Seal FKM
Supply: Power consumption max. 12 W
Supply: Voltage 24 V DC
Tightness 1 · 10-10 Pa m³/s
Type Gas regulating valve
Weight 0.75 kg | 1.65 lb
Accessories
Interface for EVR 116
Connection cable RVC-EVR/RME
Dimensions

Massbild-TIM-RS

Characteristic

Kennlinie-TIM-RS-1

Downloads
File Type Language Date Filesize Action
Data sheet PDF EN 05-12-2017 ~ 224.5 KB Download

File Type Language Date Filesize Action
Operating instructions EVR 116 - Regulating valve (BP5056BEN) PDF EN 03-02-2011 ~ 283.4 KB Download

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Your local contact

Pfeiffer Vacuum Inc.
24 Trafalgar Square
NH 03063-1988 Nashua
USA

T: +1 (800) 248-8254
F: +1 (888) 658-7983

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