Quiet
Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation
Flexible
Compatible with a variety of backing pumps, excellent compression ratio for light gases
Maintenance-free
No wearing parts thanks to magnetic bearing technology, long maintenance intervals
Technical specifications
Markets & applications
Analytics and R&D
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Plasma Physics
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High Energy Physics
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Photonics Research
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Ultra-High Vacuum
Automotive and transport
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Space Research
Flat panel display production
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Physical vapor deposition (PVD)
Semiconductor applications
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PVD
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Inspection & Metrology
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Metal & high K etch
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LPCVD / Diffusion
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Lithography
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Oxyde Etch
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ALD
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PECVD
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Cobalt, WCVD, TiN & TDMAT
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Si Poly etch
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Load Lock & Transfer
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Light deposition
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Ion Implantation
Accessories
- Installation kit
- Cooling water valve
- Purge gas valve
- Handheld remote controller
- Rack-mounted controller
- Inlet protection screen
- Heater unit
- Valve cable and coil
- Various inlet flange types
- Various user interfaces