Reliable
No wearing parts inside the compression chamber, long life cycle
Dry
Hydrocarbon-free, oil- and contact-free operation
High performance
Constant pumping speed, low ultimate pressure
Technical specifications
Markets & applications
Analytics and R&D
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Central Vacuum
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Leak Detection
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Laboratory Vacuum
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Cryogenics
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Plasma Physics
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High Energy Physics
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Photonics Research
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Ultra-High Vacuum
Automotive and transport
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Space Research
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3D Printing
Chemical and pharmaceutical industries
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Leak Detection
Electric power generation
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Green Energy Generation
Hospitals and healthcare facilities
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Medical Accelerator
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H2O2 Sterilization
Lithium-ion battery production
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Electrolyte filling
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Vacuum drying
Metallurgy
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3D Printing
Pharmaceutical industry
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Leak Detection
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Laboratory Vacuum
Refridgeration
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Vacuum Drying
Semiconductor applications
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Inspection & Metrology
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Lithography
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Load Lock & Transfer
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Ion Implantation
Technical gases
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Liquefaction
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Insulation Vacuum
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Gas Transport
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Bottle Filling
Thin film coating
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Lab coating
Accessories
- Dust filter
- External silencer
- Isolation valve
- Preventive maintenance packages
- Different versions for corrosive gases, condensable vapor pumping, gas recirculation or fluorine-free pumping
- Remote electronic for radiative environment