Multi-stage Roots pumps for noncorrosive applications | |||
|---|---|---|---|
Model | Pumping speed | Ultimate pressure with/without purge gas | Applications |
ACP 120 | 95 m³ · h-1 | 3 · 10-2 hPa | Load locks and transfer chambers with a volume of up to 1 m3, noncorrosive gases, noble gases, regeneration of cryo pumps, backing pumps for turbopumps with noncorrosive gases |
ACP 120 G | 95 m³ · h-1 | 9 · 10-2 with 35 slm purge gas | |
A100 L | 100 m³ · h-1 | 6.6 · 10-3 hPa | |
A100 L ES | 100 m³ · h-1 | 7 · 10-4 hPa | |
Multi-stage Roots pumps for corrosive applications | |||
|---|---|---|---|
Model | Pumping speed | Ultimate pressure with/without purge gas | Applications |
A 103 P | 120 m³ · h-1 | 6.5 · 10-3 hPa 2.6 · 10-2 hPa with 20 slm purge gas | Dry etching (oxide and poly) Ashing Stripping RTP Implantation |
A 603 P | 480 m³ · h-1 | 5 · 10-4 hPa 2 · 10-3 hPa with 20 slm purge gas | |
A 1003 P | 900 m³ · h-1 | 3 · 10-4 hPa 1 · 10-3 hPa with 20 slm purge gas | |
Diaphragm Pumps | |||
|---|---|---|---|
Model | Pumping speed | Ultimate pressure with/without purge gas | Applications |
A 203 H | 130 m³ · h-1 | 6 · 10-2 hPa 5 · 10-1 with 50 slm purge gas | Metal etching CVD (PECVD, SACVD, LPCVD) ALD Epitaxy Dry etching |
A 803 H | 600 m³ · h-1 | 1 · 10-3 hPa 1 · 10-2 hPa with 50 slm purge gas | |
A 1503 H | 1,100 m³ · h-1 | 2 · 10-3 hPa 9 · 10-3 hPa with 50 slm purge gas | |
A 1803 H | 1,650 m³ · h-1 | 2 · 10-3 hPa 9 · 10-3 hPa with 50 slm purge gas | |
AD 73 KH | 4,700 m³ · h-1 | 8 · 10-4 hPa 3 · 10-3 hPa with 50 slm purge gas | |