The gas loads,
q_{pV}=S\cdot p=\frac{dV}{dt}\cdot p (Formula 1-16),
HiPace turbomolecular pumps | ||||
|---|---|---|---|---|
Model | Pumping speed | Compression Ratio | Gas throughput* | Applications |
HiPace 10 | 11.5 l · s-1 | 3.0 · 107 | 0.37 hPa · l · s-1 | Analytical applications, leak detectors, gas flow control systems, incandescent and fluorescent lamp manufacturing |
SplitFlow 50 | 53 l · s-1 | >1.0 · 108 | 1.8 hPa · l · s-1 | |
HiPace 60 P | 64 l · s-1 | >1.0 · 106 | 9.2 hPa · l · s-1 | |
HiPace 80 | 67 l · s-1 | >1.0 · 1011 | 1.3 hPa · l · s-1 | Analytical applications, research & development, coating, semiconductor manufacturing |
HiPace 300 | 260 l · s-1 | >1.0 · 1011 | 5.0 hPa · l · s-1 | |
HiPace 400 | 355 l · s-1 | >1.0 · 1011 | 6.5 hPa · l · s-1 | |
HiPace 700 | 685 l · s-1 | >1.0 · 1011 | 6.5 hPa · l · s-1 | |
HiPace 800 | 790 l · s-1 | >1.0 · 1011 | 6.5 hPa · l · s-1 | |
HiPace 1200 | 1,250 l · s-1 | >1.0 · 108 | 20 hPa · l · s-1 | Glass coating, solar cell manufacturing, surface finishing, CVD, PVD / sputtering, ion implantation, plasma physics, space simulation |
HiPace 1500 | 1,450 l · s-1 | >1.0 · 108 | 20 hPa · l · s-1 | |
HiPace 1800 | 1,450 l · s-1 | >1.0 · 108 | 20 hPa · l · s-1 | |
HiPace 2300 | 1,900 l · s-1 | >1.0 · 108 | 20 hPa · l · s-1 | |
Magnetic-levitation turbopump | ||||
|---|---|---|---|---|
Model | Pumping speed | Compression Ratio | Gas throughput* | Applications |
HiPace 300 M | 255 l · s-1 | > 1 · 1011 | 28 hPa · l · s-1 | Analytics, coating, R&D |
ATH 500 M / MT | 520 l · s-1 | > 2 · 107 | 67 hPa · l · s-1 | Semiconductors, coating, R&D |
HiPace 700 M | 685 l · s-1 | > 1 · 1011 | 13 hPa · l · s-1 | Analytics, coating, R&D |
HiPace 800 M | 790 l · s-1 | > 1 · 1011 | 13 hPa · l · s-1 | |
ATH 1603 M | 1,370 l · s-1 | > 6 · 108 | 67 hPa · l · s-1 | Semiconductors, coating, R&D: Glass coating, solar cell manufacturing, surface finishing, CVD, PVD / sputtering, ion implantation, plasma physics |
ATH 1600 MT | 1,370 l · s-1 | > 5 · 108 | 67 hPa · l · s-1 | |
ATH 2303 M | 1,950 l · s-1 | > 1 · 108 | 67 hPa · l · s-1 | |
ATH 2300 MT | 1,950 l · s-1 | > 1 · 108 | 67 hPa · l · s-1 | |
ATP 2300 M | 1,850 l · s-1 | > 1 · 108 | 37 hPa · l · s-1 | |
ATH 2800 M | 2,150 l · s-1 | > 1 · 108 | 84 hPa · l · s-1 | |
ATH 2800 MT | 2,150 l · s-1 | > 1 · 108 | 84 hPa · l · s-1 | |
ATH 3200 M | 2,700 l · s-1 | > 1 · 108 | 84 hPa · l · s-1 | |
ATH 3200 MT | 2,700 l · s-1 | > 1 · 108 | 84 hPa · l · s-1 | |
