From Rough to Ultra-High Vacuum Applications

Serving all vacuum levels with innovative technology.

Vacuum technology for your application

Helium leak detection

Precise helium leak detection ensures the integrity of vacuum systems for safe and efficient operation.

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Generation of ultra-high vacuum (UHV)

UHV enables groundbreaking research and production in ultra-clean, particle-free environments.

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Container Closure Integrity Testing (CCIT)

Vacuum-based CCIT ensures sterile, leak-free packaging for pharmaceutical safety and quality.

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Residual gas analysis (RGA)

RGA in vacuum systems identifies contaminants, ensuring process cleanliness and equipment protection.

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Mass spectrometry

Vacuum enables accurate ion transport for precise mass analysis in advanced spectrometry techniques.

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Heat treatment/Vacuum furnaces

Vacuum heat treatment enables uniform material transformation at low process temperatures, ensuring consistent quality and surface finish.

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Accelerators

Vacuum in accelerators ensures particle beam stability for high-precision research and imaging.

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Leak testing in automotive, aeronautics and refrigeration

Vacuum leak detection ensures safety and efficiency in high-performance automotive and aerospace systems.

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Electron microscopy

Vacuum allows electron flow without scattering, delivering high-resolution imaging of even the tiniest structures.

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Lithium-ion batteries

Vacuum processes improve battery performance, cleanliness, and safety during cell manufacturing.

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Thin film coating

Vacuum ensures uniform thin films for high-performance optical, electronic, and decorative layers.

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Solar cell manufacturing

High vacuum ensures carbon-free environments for efficient, high-quality solar cell production.

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Hydrogen fuel cells

Vacuum technology ensures safe, leak-free hydrogen storage and efficient fuel cell operation.

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Space simulation

Vacuum chambers simulate outer space for testing satellite and spacecraft performance reliably.

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EUV lithography

Vacuum is critical for precise, particle-free EUV lithography in semiconductor production.

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Semiconductor etching and cleaning

Vacuum enables precise etching and cleaning for nanoscale semiconductor manufacturing.

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Airborne molecular contamination (AMC)

One of the main sources of wafer defectivity causing yield losses in semiconductor fabs.
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Thin film deposition

Vacuum in thin film deposition for semiconductors minimizes contamination, ensures uniformity, and allows precise control over the deposition process.
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Load lock and transfer

Vacuum solutions for load lock or transfer applications.
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Ion source, beamline and end station

The production of a semiconductor component is a highly intricate process including multiple stages carried out in a vacuum environment.
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CD-SEM

A growing number of production steps and extremely small device dimensions make wafer inspection and metrology more crucial than ever.
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3D printing

Vacuum prevents oxidation, improves material quality, and boosts energy efficiency by allowing higher energy densities during melting.
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Sterilization

Sterilization is a process to kill different kinds of microorganisms such as fungi, bacteria, viruses and spores.
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