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From Rough to Ultra-High Vacuum Applications

Serving all vacuum levels with innovative technology.

Vacuum technology for your application

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    Helium leak detection

    Precise helium leak detection ensures the integrity of vacuum systems for safe and efficient operation.

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    Generation of ultra-high vacuum (UHV)

    UHV enables groundbreaking research and production in ultra-clean, particle-free environments.

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    Container Closure Integrity Testing (CCIT)

    Vacuum-based CCIT ensures sterile, leak-free packaging for pharmaceutical safety and quality.

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    Residual gas analysis (RGA)

    RGA in vacuum systems identifies contaminants, ensuring process cleanliness and equipment protection.

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    Mass spectrometry

    Vacuum enables accurate ion transport for precise mass analysis in advanced spectrometry techniques.

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    Heat treatment/Vacuum furnaces

    Vacuum heat treatment enables uniform material transformation at low process temperatures, ensuring consistent quality and surface finish.

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    Accelerators

    Vacuum in accelerators ensures particle beam stability for high-precision research and imaging.

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    Leak testing in automotive, aeronautics and refrigeration

    Vacuum leak detection ensures safety and efficiency in high-performance automotive and aerospace systems.

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    Electron microscopy

    Vacuum allows electron flow without scattering, delivering high-resolution imaging of even the tiniest structures.

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    Lithium-ion batteries

    Vacuum processes improve battery performance, cleanliness, and safety during cell manufacturing.

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    Thin film coating

    Vacuum ensures uniform thin films for high-performance optical, electronic, and decorative layers.

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    Solar cell manufacturing

    High vacuum ensures carbon-free environments for efficient, high-quality solar cell production.

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    Hydrogen fuel cells

    Vacuum technology ensures safe, leak-free hydrogen storage and efficient fuel cell operation.

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    Space simulation

    Vacuum chambers simulate outer space for testing satellite and spacecraft performance reliably.

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    EUV lithography

    Vacuum is critical for precise, particle-free EUV lithography in semiconductor production.

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    Semiconductor etching and cleaning

    Vacuum enables precise etching and cleaning for nanoscale semiconductor manufacturing.

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    Airborne molecular contamination (AMC)

    One of the main sources of wafer defectivity causing yield losses in semiconductor fabs.

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    Thin film deposition

    Vacuum in thin film deposition for semiconductors minimizes contamination, ensures uniformity, and allows precise control over the deposition process.

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    Load lock and transfer

    Vacuum solutions for load lock or transfer applications.

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    Ion source, beamline and end station

    The production of a semiconductor component is a highly intricate process including multiple stages carried out in a vacuum environment.

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    CD-SEM

    A growing number of production steps and extremely small device dimensions make wafer inspection and metrology more crucial than ever.

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    3D printing

    Vacuum prevents oxidation, improves material quality, and boosts energy efficiency by allowing higher energy densities during melting.

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    Sterilization

    Sterilization is a process to kill different kinds of microorganisms such as fungi, bacteria, viruses and spores.

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