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Because it localizes rather than just confirms that leaks exist, helium spraying turns a 'leak detector' into a true leak finder.
Challenges in semiconductor manufacturing
Challenges in systems building
Challenges in UHV environments
(e.g. vacuum furnaces or coaters)
ASM 340
ASM 310
ASM 390/392
ASM 340
ASM 310
ASM 390/392
Leaks can result from:
A virtual leak occurs when trapped gases (often water vapor) slowly release from cavities like screw threads or porous materials. Though not a real breach, this outgassing can mimic a leak.
They can be difficult to detect under partial pressure conditions and require highly sensitive methods for detecting leaks. High-accuracy helium leak detectors or extended monitoring are needed to identify them.
No. WD-40 leaves oily residues and contaminants in vacuum environments, especially below 1×10⁻³ hPa. Use isopropanol or other alcohol-based liquids instead – they evaporate cleanly and temporarily seal the leak, indicating its location.
Helium is the preferred tracer gas used across several methods of leak testing, especially in vacuum environments.
These are the reasons:
Modern helium leak detectors (e.g. ASM series) support:
Among the available leak testing methods, helium spraying provides sufficient accuracy for detecting most relevant leaks. Helium spraying is for localization, not absolute rate measurement. It detects leaks down to approx. 10⁻⁷ to 10⁻⁹ mbar∙l/s – suitable for most vacuum applications.
Strengths:
Helium spraying and sniffing are just two of several methods in vacuum leak testing. The choice depends on pressure conditions and whether the system is under vacuum or filled with air.
Helium spraying | Helium sniffing | |
|---|---|---|
Helium flow | Outside → inside | Inside → outside |
Use case | Vacuum in the chamber | Pressurized chamber |
Helium quantity | Small, controlled | Full pressurization |
Most detectors support both modes. For vacuum leak detection, spraying remains the most efficient and cost-effective approach.
In large systems, helium may take time to travel through the leak path. Optimize by:
Yes, especially when detecting leaks caused by ingress of air or other gases, alternative methods like Quadrupole Mass Spectrometers (QMS) provide additional accuracy.
QMS can detect gases like nitrogen, water vapor, or argon. Useful in diagnostics, pharma, and R&D environments, they analyze leaks via mass-to-charge ratio.
Your choice should reflect your setup requirements – including mobility, response time, pumping speed, and integration flexibility:
The right tools can make helium leak detection more precise and efficient.
Key accessories include:
