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Maintenance work

Please note that due to maintenance work, disruptions may occur on July 15, 2025, between 09:00 and 15:00 (CEST). Thank you for your understanding.

Facilities & Maintenance

Facilities And Maintenance

Any single leak present on a semiconductor tool and its related facilities can impact manufacturing throughput and yield. Consequences vary from loss of production due to process specs not met, to critical safety hazard. Therefore, leak detection is a critical and mandatory step of any new tool commissioning in the clean room or after any maintenance intervention. At the basement level, forelines & dry pumps are also regularly exchanged for cleaning or repair. We provide comprehensive leak detection solutions which guarantee vacuum integrity of your installation from process chambers down to gas abatement. Our goal: Maximize your production yield.

Application Reports

In our application reports you can learn more about the many applications in which our vacuum solutions are used by our customers!

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