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Please note that due to maintenance work, disruptions may occur on July 15, 2025, between 09:00 and 15:00 (CEST). Thank you for your understanding.

Lithography

Lithography

Manufacturing of a semiconductor component is a very complex process. Photolithography process is one of them and consists of defining and transferring patterns in each layer of the device. As chip node dimensions continuously shrink, traditional photolithography using Ultra Violet (UV) light has reached its limits. A new lithography process using Extreme Ultra Violet light (EUV) under vacuum has emerged. We provide high vacuum turbopumps and primary dry pumps solutions dedicated to EUV application, supporting advanced chip scaling below 10 nm node.

Application Reports

In our application reports you can learn more about the many applications in which our vacuum solutions are used by our customers!

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