Residual Gas Analysis Systems

The HiCube Neo RGA can operate in the pressure range from atmosphere to high vacuum. It is equipped with an integrated shut-off valve for precise inlet pressure adjustment. For additional protection, the system features a DigiLine full-range transmitter, which safeguards the mass spectrometer by continuously monitoring the total pressure. If the pressure exceeds safe levels, the transmitter automatically triggers the shutdown of the filament inside the mass spectrometer, preventing damage. This mechanism ensures the system is protected from operating errors and eliminates the need for costly filament replacements, saving on long-term maintenance costs.

The HiCube Neo RGA offers both digital as well as analog inputs and outputs, enabling the collection of external data such as pressure or gas flow. This data can then be transferred to external control units, allowing for comprehensive process monitoring.

The integrated HiCube Neo can be intuitively controlled via its touch screen, which not only displays measured values but also shows signals from connected external components like vacuum gauges. This provides full control over your analysis. The PV MassSpec software further enables easy and quick access to your data.

The HiCube Neo RGA can be customized to suit your specific processes. For example, the recipient – the chamber in which vacuum is generated – can be equipped with a heater. This evaporates possible residual gases that may have adsorbed onto the chamber walls. During operation, these trapped gases can gradually release and interfere with measurements, creating an unwanted background signal. By heating the chamber, these residual gases are desorbed and evacuated, reducing contamination and improving the accuracy of your analysis. The system can further be equipped with additional manual inlet valves for greater flexibility in sample handling. Additionally, when mounted on a trolley, the HiCube Neo RGA becomes a mobile solution, allowing for easy transport and use in different locations.

The selection of the quadrupole mass spectrometer (PrismaPro or HiQuad Neo) and the determination of the number of chambers have a significant influence on the achievable detection limit. In the standard system there are two chambers, one in which the test specimen lies and one in which the spectrometer is located. If necessary, this structure can be supplemented with a third chamber, the lock chamber. This avoids contamination of the measuring chamber from the environment and significantly reduces the background. By baking out the system, it is optimally conditioned, which further increases the measurement capability.

In the area of customized systems, we have even more to offer beyond residual gas analysis systems. Our knowledge of the requirements of the semiconductor, pharmaceutical, metallurgical and emerging markets, acquired over many years of experience, goes into the development of state-of-the-art systems that help you assert yourself in your industry. For example, we have developed contamination management systems that aim to identify and minimize contaminants and optimize production processes at every stage. For higher yields through improved quality and shorter cycle times.

In addition to self-sufficient units, we also offer modular solutions that you can integrate into your system. This includes, among others, our leak test module (LTM for short), which you can integrate into your production line for series production. For pre-series production, it is also available as an individual test stand for manual qualification. The customer-specific configurable modules can cover the full range of test methods and parameters, and are partially assembled by us. With our experience in mechanical and software integration, we support our customers in implementing their solution.